JPH0474538U - - Google Patents

Info

Publication number
JPH0474538U
JPH0474538U JP11720890U JP11720890U JPH0474538U JP H0474538 U JPH0474538 U JP H0474538U JP 11720890 U JP11720890 U JP 11720890U JP 11720890 U JP11720890 U JP 11720890U JP H0474538 U JPH0474538 U JP H0474538U
Authority
JP
Japan
Prior art keywords
gas introduction
vaporization
vaporization section
phase chemical
introduction pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11720890U
Other languages
English (en)
Japanese (ja)
Other versions
JP2533811Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11720890U priority Critical patent/JP2533811Y2/ja
Publication of JPH0474538U publication Critical patent/JPH0474538U/ja
Application granted granted Critical
Publication of JP2533811Y2 publication Critical patent/JP2533811Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
JP11720890U 1990-11-09 1990-11-09 微粉、超微粉製造用気相化学反応装置 Expired - Fee Related JP2533811Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11720890U JP2533811Y2 (ja) 1990-11-09 1990-11-09 微粉、超微粉製造用気相化学反応装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11720890U JP2533811Y2 (ja) 1990-11-09 1990-11-09 微粉、超微粉製造用気相化学反応装置

Publications (2)

Publication Number Publication Date
JPH0474538U true JPH0474538U (en]) 1992-06-30
JP2533811Y2 JP2533811Y2 (ja) 1997-04-23

Family

ID=31865090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11720890U Expired - Fee Related JP2533811Y2 (ja) 1990-11-09 1990-11-09 微粉、超微粉製造用気相化学反応装置

Country Status (1)

Country Link
JP (1) JP2533811Y2 (en])

Also Published As

Publication number Publication date
JP2533811Y2 (ja) 1997-04-23

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees